Mobile Combi Laser MBE Device "MC-LMBE"
Standard equipped with scanning RHEED! Two motor-driven combinatorial masks installed.
The "MC-LMBE" is a compact ultra-high vacuum laser MBE (PLD) system with high operability. It is equipped with a semiconductor laser substrate heating unit that can heat up to 1200°C. It also has two motor-driven combinatorial masks. Additionally, the load-lock chamber unit allows for easy replacement of targets and substrates in a vacuum. 【Features】 ■ High operability and compact design ■ Achievable vacuum level: 6.7×10^-7Pa (below 5×10^-9Torr) ■ Two motor-driven combinatorial masks ■ Semiconductor laser substrate heating unit capable of heating up to 1200°C ■ Six types of targets available *For more details, please refer to the PDF document or feel free to contact us.
- Company:パスカル
- Price:Other